[craigjb]

Equipment for ion implantation already includes mini accelerators [1] [2]. The semiconductor equipment industry in general has many machines that feel like they came out of a physics lab into a semi fab. For example, plasma dry-etching or deep-reactive ion etching. EUV litho is just one of many very interesting problems--currently the bottleneck so it's talked about a lot.

[1] https://en.wikipedia.org/wiki/Ion_implantation [2] https://www.axcelis.com/products/purion-xe-series-high-energ...

edit: add link to cool ion implanter machine pics