IIRC EU/EUCLIDES exploration of EUV light source concluded synchrotron easier/cheaper to _technically_ operate long term, but exploration limited to 8W, compact designs. As far as I can tell, getting to higher power = scaling up size to 100s of m = made it logistically infeasible to build/plan fabs around. The Tsinghua SSMB design is 40m diameter, which is compact enough to be useful. Also ASML chose laser plasma because they thought synchrotron was too expensive to build, but years of technical challenges and a machine costs 200m, next gen will be 400m... that's already the price of multiple small synchrotrons. TLDR is laser plasma, works, is very expensive to operate, and ASML is probably locked in due to sunk cost.
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