Hah, I left actual silicon process engineering a long time ago, but I worked on the early 68020 at 2um and then early submicron in R&D. That was 40 years ago and the process now 1000x smaller (1 million more transistors). It's pretty amazing... even if it does seem like fab investment costs have grown so much that we're nearing the end of profitable scaling.
kurthr|2 years ago