[s0rce]

ITs easy to make X-rays, you just hit a metal target with electrons: https://en.wikipedia.org/wiki/X-ray_tube

[YetAnotherNick]

You can hit metal the same way for EUV.

[on_the_train]

No you can't, or rather you only get a tiny amount in the correct wavelengths

[s0rce]

I assume this doesn't work well otherwise everyone would be doing it.