Right now the only way to make "bright" EUV (100-200 watts) is to spray fine drops of a metal in a stream, then target and blast each drop with a laser.
If you wrote a science fiction novel around the idea that we make computing devices by blasting fine drops of tin in a vacuum with a laser exactly 3 times at exactly 100,000 drops per second, nobody would believe it. Truth is crazier than fiction.
TheJoeMan|7 days ago
ufmace|7 days ago