If you think it barely works now, you should've seen it when we first started. Availability of a machine was "fuck you"% and the whole system was held together by duct tape, bubblegum and hope. Compared to that the current system is entirely controllable.
itishappy|5 days ago
We do actually have functioning processes for XRay litho today, but we'll need that same level (or more) of investment and effort to make it economical.