Yes, of course the etching on silicon process has been refined to a level nobody thought possible. But this is more like a CNC process at a tiny level. What we don't have is additive manufacturing at nano scale. The nano assembler that Drexler and Feynman thought were possible is not panning out.
KK7NIL|5 days ago
This video is a good summary of the main steps involved: https://youtu.be/xaKyDrWfHes
It's certainly not as powerful or universal as 3D printing and it might not even be "additive manufacturing" proper, but it is a lot more than just etching/subtractive manufacturing.